Robustness Validation - MEMS
Robustness Validation for MEMS –
Appendix to the Handbook for Robustness Validation of Semiconductor Devices in Automotive Applications
Robustness Validation (RV) is a valuable failure-mechanism-driven approach to product reliability and qualification, which relates real application conditions to test conditions.
MEMS sensors build up a special category of devices that need specific considerations. By their very nature, MEMS sensors are often exposed to harsh environmental conditions that are in an obvious way not covered by standard stress test conditions used in product qualifications. Neither commonly referenced product qualification standards nor “Handbook for Robustness Validation of Semiconductor Components in Automotive Applications” published by ZVEI in April 2007 adequately represent the sensor needs. It is for this reason that sensor manufacturers joined in a team organised by ZVEI to discuss the application of Robustness Validation to sensor devices. The results are published and can be oredered from ZVEI.
Contents:
• Introduction
• Terms, Definitions, and Abbreviations
• Mission Profile
• Knowledge Matrix
• Acceleration Factors / Testing
• Summary and Outlook
• References and Additional Reading
• Participants of the Working Group
• Appendix:
- Mission Profile Examples
- Knowledge Matrix Table
- Overview Stress Tests
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